Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling
نویسندگان
چکیده
منابع مشابه
Design and Fabrication of Topologically Optimal Miniature Microgripper Integrated with an Electro-Thermal Microactuator
This paper presents a topological-optimization method which applies the theory of ground structure parameterization to design and analyzes a microgripper device. The study defines the compliant design domain as 2000μm×2000μm with a 200μm thickness, and discusses the effect of different optimization parameters. The driver is an electro-thermal microactuator that can actuate approximately 6000μN ...
متن کاملdesign of an analog ram (aram)chip with 10-bit resolution and low-power for signal processing in 0/5m cmos process
برای پردازش سیگنال آنالوگ در شبکه های عصبی ، معمولا نیاز به یک واحد حافظه آنالوگ احساس میشود که بدون احتیاج به a/d وd/a بتواند بطور قابل انعطاف و مطمئن اطلاعات آنالوگ را در خود ذخیره کند. این واحد حافظه باید دارای دقت کافی ، سرعت بالا ، توان تلفاتی کم و سایز کوچک باشد و همچنین اطلاعات را برای زمان کافی در خود نگهدارد. برای پیاده سازی سیستمی که همه این قابلیتها را در خود داشته باشد، کوشش...
15 صفحه اولdevelopment and implementation of an optimized control strategy for induction machine in an electric vehicle
in the area of automotive engineering there is a tendency to more electrification of power train. in this work control of an induction machine for the application of electric vehicle is investigated. through the changing operating point of the machine, adapting the rotor magnetization current seems to be useful to increase the machines efficiency. in the literature there are many approaches wh...
15 صفحه اولDesign and Fabrication of an Angular Microactuator for Magnetic Disk Drives
Angular electrostatic microactuators suitable for use in a two-stage servo system for magnetic disk drives have been fabricated from molded chemical-vapor-deposited (CVD) polysilicon using the HexSil process. A 2.6-mm-diameter device has been shown to be capable of positioning the read/write elements of a 30% picoslider over a 1m range, with a predicted bandwidth of 2 kHz. The structures are fo...
متن کاملsimulation and design of electronic processing circuit for restaurants e-procurement system
the poor orientation of the restaurants toward the information technology has yet many unsolved issues in regards to the customers. one of these problems which lead the appeal list of later, and have a negative impact on the prestige of the restaurant is the case when the later does not respond on time to the customers’ needs, and which causes their dissatisfaction. this issue is really sensiti...
15 صفحه اولذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 1994
ISSN: 0924-4247
DOI: 10.1016/0924-4247(93)00704-8